75 bolt E鼎晟达==www.ic37.com(31)

3AMAT0020-34055Screw,Captive,410074

NEWAMAT0020-34090GDP37Hole,MXPEtchchamber,Distributionplate

NEWAMAT0020-34090GDPEGEC37Hole,MXPEtchchamber,Distributionplate

AMAT0020-34090showerhead,Gasdistributionplate,anodized,37holes

AMAT0020-34096ESCChuck,200mm,EtchChamber,400231

AMAT0020-34253ExhaustDuct14"Wide,EXHENCL."T"

AMAT0020-34312Inlet,GasFeed,P5000,410002

AMAT0020-34379LID,PUMPINGPLATE,EXZ,Etch

AMAT0020-34381GASBOX,EXZ407128

AMAT0020-34427Plug,Heater,240871

AMAT0020-34427Plug,Heater,240873

AMAT0020-34427Plug,Heater,240871

AMAT0020-34427Plug,Heater,240873

3AMAT0020-34432Clamp,Bracket,Bulkhead,DPS,Etch

amat 0020-20676 eep-g-065 obs, cover preclean cooldown。

amat 0020-22939 bracket, gage source water line。

amat 0020-14851 block - door mounting left hand 401903。

amat 0020-25041 clamp ring 6" smf strd edge tin。

AMAT0020-34444Plate,FaceDXZ,406028

PLATEMOUNT,FLTNGJNT,DPS

AMAT0020-34478Rev.P6,Chassis,Plate,Throttle,DPS.419613

NEWAMAT0020-34484Shield,GND,8inchCATHODE,DPS

amat 0020-20676 eep-g-065 obs, cover preclean cooldown。

amat 0020-22939 bracket, gage source water line。

amat 0020-14851 block - door mounting left hand 401903。

amat 0020-01071 gas feed connector。

AMAT0020-34527Rev.A,SensorPlate,LoadlockCover,P5000,AMP-070-001.418371

4AMAT0020-34594Rev.AInsulatorRFDXZViewLidMEI-A-09698

Chamberliner,anodizedGDP,R2,Oxide,Geco

2AMAT0020-34763Insulator,Thermal,Gasket,POSA-DR2,SSGD,410211

2AMAT0020-34763Insulator,Thermal,Gasket,POSA-DR2,SSGD,410212

AMAT0020-34765Jig,CathodeCarrier,420786

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